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자료 필터
자료유형
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2023 ~ 2026
2023 2026
키워드
언어
전체 20건 중 1번부터 10번까지의 결과를 표시합니다.
2026
Article
Self-Activating atomic layer deposition: A kinetic strategy for growth of metastable, high work function MoO2 thin films
- Park, Hyun-June ;
- Seok, Kyu-Hwan ;
- Kim, Muheon ;
- Lee, Subin ;
- Cho, Min-Su ;
- ... Lee, Woongkyu ;
- 외 4명
- 2026-09
- Applied Surface Science
- ELSEVIER
Article
Crystallinity and stoichiometry engineering in TiO2 thin films via O3 post-treatment for enhanced dielectric properties
- Hong, Juan ;
- Kim, Hyeongjun ;
- Cho, Seokho ;
- Lyu, Kyunghun ;
- Kwon, Soonbin ;
- ... Shin, Keun-Young ;
- ... Lee, Woongkyu
- 2026-05
- Ceramics International
- ELSEVIER SCI LTD
Article
Indirect Synthesis of Carbon-Free Perovskite SrTiO3 Thin Films via SrF2 and TiO2 ALD for DRAM Capacitors
- Lee, Jaejun ;
- Jeong, Sangyeon ;
- Lyu, Kyunghun ;
- Kim, Taehyun ;
- Park, Chanwoo ;
- ... Lee, Woongkyu ;
- 외 2명
- 2026-05
- Applied Surface Science
- ELSEVIER
Article
Suppression of interfacial layers in ZrO2/TiN capacitors by atomic layer deposition using ligand-engineered Zr precursors for scalable DRAM
- Kim, Hyeongjun ;
- Hong, Juan ;
- Jeong, Sangyeon ;
- Lyu, Kyunghun ;
- Jo, Seungmin ;
- ... Lee, Woongkyu ;
- 외 4명
- 2026-02
- Materials Horizons
- ROYAL SOC CHEMISTRY
Article
Atomic layer deposition of Al2O3 thin films using trimethylaluminum and acetone
- Lee, Yeji ;
- Lim, Daeun ;
- Kim, Jonghyun ;
- Kim, Hyeongjun ;
- Sung, Dongchul ;
- ... Lee, Woongkyu ;
- 외 4명
- 2026-02
- Applied Surface Science
- ELSEVIER
Article
Synthesis of heteroleptic [Sr(ddemap)(tmhd)]2 and its use in atomic layer deposition of low carbon SrO thin films
- Lee, Yeji ;
- Park, Chanwoo ;
- Jeong, Sangyeon ;
- Lim, Daeun ;
- Kim, Jonghyun ;
- ... Lee, Woongkyu ;
- 외 6명
- 2026-01
- RSC Advances
- ROYAL SOC CHEMISTRY
2025
Article
Quantum phase coherent tunneling in a mixed-morphology superlattice heterostructure
- Shao, Qing ;
- Aygen, Can C. ;
- Chen, Xianyu ;
- Lee, Woongkyu ;
- Chang, Robert P. H. ;
- 외 2명
- 2025-11
- Physical Review b
- AMER PHYSICAL SOC
Article
Enhanced crystallization and dielectric properties of atomic layer deposited SrTiO3 thin films on Ru electrode by inserting GeO2 interfacial layer
- Paik, Heewon ;
- Lim, Junil ;
- Seo, Haengha ;
- Kim, Tae Kyun ;
- Shin, Jonghoon ;
- ... Lee, Woongkyu ;
- 외 4명
- 2025-09
- Materials Horizons
- ROYAL SOC CHEMISTRY
Article
Atomic layer deposition of Ru/rutile Al-TiO2/Ru layer stacks for high-performance silicon capacitors
- Kim, Taehyun ;
- Lim, Da Eun ;
- Kim, Hyeongjun ;
- Nah, Hyunmin ;
- Park, Heun ;
- ... Lee, Woongkyu ;
- 외 1명
- 2025-08
- Materials Science in Semiconductor Processing
- ELSEVIER SCI LTD
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