A variable stiffness mechanism for a movable magnet track of a linear motor stage

초록

A movable magnet track for a linear motor stage changes the reaction force of a magnet track into vibration energy and reduces the stage base vibration. Although a movable magnet track can reduce the base vibration, the dynamic characteristic of the movable magnet track may be modified against the motion profile variation. This paper presents a variable stiffness mechanism for a movable magnet track of a linear motor stage. First, we introduce a passive Reaction force compensation (RFC) using a movable magnet track, and the Negative stiffness mechanism (NSM). Then, the variable stiffness mechanism using the NSM is used to reduce the stage base vibration. Lastly, simulations are performed using a linear motor motion stage with the NSM and the movable magnet track. The variable stiffness mechanism using the NSM not only reduces the reaction force but also adjusts the dynamic characteristic of the system.

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