Electrochemical etching of stainless steel through laser masking

  • Shin, Hong Shik; 
  • Chung, Do Kwan; 
  • Park, Min Soo; 
  • Kim, Bo Hyun; 
  • Chu, Chong Nam
Citations

WEB OF SCIENCE

8
Citations

SCOPUS

19

초록

A new micro patterning process without the need for a mask is proposed in this paper. It is a combination of laser masking and electrochemical etching. In electrochemical etching through laser masking (EELM), selective electrochemical dissolution of stainless steel is achieved in a 2 M sodium nitrite electrolyte. The micro-patterned surface layer of stainless steel is formed by laser marking using an ytterbium pulsed fiber laser. After the laser masking process, the patterned surface of stainless steel is selectively dissolved under an appropriate electrochemical etching condition because the laser-marked area can temporarily act as a barrier during electrochemical etching. The characteristics of the laser-marked surfaces have been investigated by scanning electron microscopy (SEM), x-ray diffractometry (XRD) and x-ray photoelectron spectroscopy (XPS). The polarization curve has been used to evaluate electrochemical dissolution behaviors. The EELM process enables the electrochemical micro-machining of stainless steel without photolithography technology; thus, it can be applied in micro fabrication, micro patterning and surface texturing.

키워드

CORROSION PERFORMANCE; MICROFABRICATION; OXIDATION; TITANIUM; FILM; XPS
제목
Electrochemical etching of stainless steel through laser masking
저자
Shin, Hong Shik; Chung, Do Kwan; Park, Min Soo; Kim, Bo Hyun; Chu, Chong Nam
DOI
10.1088/0960-1317/20/5/055030
발행일
2010-05
유형
Article
저널명
Journal of Micromechanics and Microengineering
권
20
호
5