Mechanism and control of reaction force compensation of XY linear motion stage system

초록

In this paper, a reaction-force compensation system for an XY linear motion stage, without an additional external isolation structure or extra motors, is developed. This system consists of a movable magnet track, a spring, a dummy weight, and a dedicated sensor module that measures the relative positions of the movable magnet track with respect to the motor coil. The reaction force compensation system is modeled, and simulations are carried out to optimize design parameters such as the moving distance of the magnet track, the transmission force, the dummy weight, and the allowed size of the mechanism. An XY linear motion stage is built, incorporating the reaction force compensation system, and the performance of the system is verified experimentally. For acceleration and deceleration values of 10 m/s2, 85% of the reaction force is absorbed by the reaction force compensation system. © 2011 The Korean Society of Mechanical Engineers.

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