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Spatially resolved characterization of plastic deformation induced by focused-ion beam processing in structured InGaN/GaN layers
- Barabash, R.;
- Ice, G.;
- Kroger, R.;
- Lohmeyer, H.;
- Sebald, K.;
- ... Chung, J.-S.;
- 외 4명
초록
Polychromatic X-ray microbeam analysis (PXM) results of structural changes caused by FIB machining in nitride heterostructures are discussed in connection with micro-photoluminescence (μ-PL), fluorescent analysis, scanning electron (SEM) and transmission electron microscopy (TEM) data. It is shown that FIB processing distorts the lattice in the InGaN/GaN layer not only in the immediate vicinity of the processed area but also in surrounding volumes. A narrow amorphized top layer is formed in the direct ion beam impact area. © 2007 Materials Research Society.
- 제목
- Spatially resolved characterization of plastic deformation induced by focused-ion beam processing in structured InGaN/GaN layers
- 저자
- Barabash, R.; Ice, G.; Kroger, R.; Lohmeyer, H.; Sebald, K.; Gutowski, J.; Bottcher, T.; Hommel, D.; Liu, W.; Chung, J.-S.
- 발행일
- 2007
- 학회명
- Ion-Beam-Based Nanofabrication
- 개최지
- San Francisco, CA
- 학회 개최일
- 2007-04-10 ~ 2007-04-12