SEMI-ACTIVE CONTROL RFC(REACTION FORCE COMPENSATION) FOR A LINEAR MOTOR MOTION STAGE BY SWITCHING AN EXTRA COIL

제목
SEMI-ACTIVE CONTROL RFC(REACTION FORCE COMPENSATION) FOR A LINEAR MOTOR MOTION STAGE BY SWITCHING AN EXTRA COIL
저자
안형준
발행일
2016-11
학회명
The 7th International Conference on Positioning Technology
개최국가
대한민국