Customized Current Control of a Linear Motor Motion Stage

초록

In the 4th Industrial Revolution, advancements in semiconductor technology demand high performance, efficiency, and precision, highlighting the importance of high-speed and ultra-precise motion stages. To improve positioning performance of a motion stage, robust torque generation by current controllers alongside position control is crucial. This paper explored a custom current control for linear motor motion stages. We built a linear motor motion stage with a 560 mm stroke, 5 m/s speed, and 280 N continuous thrust supported by air bearings and equipped with a passive reaction force compensation. Custom user code for position and current controls of PowerPMAC motion controller was developed for the motion stage. The position control code included frequency domain system identification, disturbance observer, and repetitive learning control while the current control code featured vector or d/q-axis current controllers and disturbance observer. We developed a current control tuning GUI to adjust the current control gain by injecting an excitation signal into the motion controller and measuring the frequency response of the open-loop transfer function. Experimental results confirmed the effectiveness of the custom current controller for evaluating static and dynamic performance.

키워드