Spin coating nanopatterned multielemental materials via self-assembled nanotemplates

  • Xia, Guodong
  • Jeong, Seong-Jun
  • Kim, Ji Eun
  • Kim, Bong Hoon
  • Koo, Chong-Min
  • 외 1명
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초록

Spin coating of multicomponent precursor solutions was employed in conjunction with block copolymer nanotemplates to fabricate nanopatterned functional multielemental materials. Nanodot and nanowire arrays of several multielemental materials exhibiting optoelectronic and multiferroic properties have been fabricated on various substrates to demonstrate the versatility of our approach. The shape, size and density of nanopatterned multielemental materials can be tuned in a variety of ways. This low cost and large scale solution nanopatterning process without a harsh etching step may offer a new opportunity for development of ultrahigh density device nanostructures.

키워드

BLOCK-COPOLYMER LITHOGRAPHYTHIN-FILM TRANSISTORSOPTICAL-PROPERTIESBEAM LITHOGRAPHYROOM-TEMPERATUREARRAYSZNONANOSTRUCTURESFABRICATIONTEMPLATES
제목
Spin coating nanopatterned multielemental materials via self-assembled nanotemplates
저자
Xia, GuodongJeong, Seong-JunKim, Ji EunKim, Bong HoonKoo, Chong-MinKim, Sang Ouk
DOI
10.1088/0957-4484/20/22/225301
발행일
2009-06
유형
Article
저널명
Nanotechnology
20
22