AN INPUT-SHAPING METHOD FOR A LINEAR MOTOR MOTION STAGE WITH A PASSIVE RFC(REACTION FORCE COMPENSATION) MECHANISM

제목
AN INPUT-SHAPING METHOD FOR A LINEAR MOTOR MOTION STAGE WITH A PASSIVE RFC(REACTION FORCE COMPENSATION) MECHANISM
저자
안형준
발행일
2016-11
학회명
The 7th International Conference on Positioning Technology
개최국가
대한민국