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PCD 공구를 이용한 단결정 SiC의 미세 구멍 가공
- 이의석;
- 양찬영;
- 이주현;
- 김보현
SCOPUS
8초록
Silicon carbide (SiC) has been used as a material for semi-conductor, molds, and micro-electro-mechanical systems (MEMS) because of its superior thermal, electrical, and mechanical properties. However, micro machining of SiC is verychallenging due to its hardness and brittleness. This paper presents an experimental study of micro hole drilling of SiC. In this study, polycrystalline diamond (PCD) was used as a tool to overcome the hardness of SiC. The micro PCD tool with a diameter of 110 μm was fabricated by micro electrical discharge machining (EDM). Micro drilling was conducted with varying machining parameters such as tool rotational speed and feed rate. Effects of surface roughness of the tool and lubrication method were also investigated.
키워드
- 제목
- PCD 공구를 이용한 단결정 SiC의 미세 구멍 가공
- 제목 (타언어)
- Micro Drilling of Single Crystal SiC Using Polycrystalline Diamond Tool
- 저자
- 이의석; 양찬영; 이주현; 김보현
- 발행일
- 2021-07
- 저널명
- 한국정밀공학회지
- 권
- 38
- 호
- 7
- 페이지
- 471 ~ 478
- 언어
- KOR
- 출판사
- 한국정밀공학회
- 발행국가
- 대한민국
- 분량
- 8 페이지
- ISSN
- E 2287-8769
P 1225-9071