Directed self-assembly of block copolymers for universal nanopatterning

  • Kim, Bong Hoon
  • Kim, Ju Young
  • Kim, Sang Ouk
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초록

Block copolymers (BCP) are self-assembling polymeric materials that have been extensively investigated for several decades. Recently, directed self-assembly (DSA) of BCPs has received enormous research attention from both academia and industry as next-generation nanolithography technology. This article provides a brief introduction to (i) the spontaneous and directed self-assembly of BCPs, (ii) the orientation and lateral ordering of BCP nanopatterns and their relationships with DSA strategies, (iii) various potential applications of BCP nanopatterning, and (iv) mussel-inspired BCP nanopatterning for arbitrary substrate materials including low surface energy materials.

키워드

SOFT GRAPHOEPITAXYSURFACE PATTERNSLARGE-AREALITHOGRAPHYTEMPLATESGRAPHENEPOLYMERARRAYSPHOTORESISTFABRICATION
제목
Directed self-assembly of block copolymers for universal nanopatterning
저자
Kim, Bong HoonKim, Ju YoungKim, Sang Ouk
DOI
10.1039/c2sm27535j
발행일
2013-03
유형
Article
저널명
Soft Matter
9
10
페이지
2780 ~ 2786