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초록
Block copolymers (BCP) are self-assembling polymeric materials that have been extensively investigated for several decades. Recently, directed self-assembly (DSA) of BCPs has received enormous research attention from both academia and industry as next-generation nanolithography technology. This article provides a brief introduction to (i) the spontaneous and directed self-assembly of BCPs, (ii) the orientation and lateral ordering of BCP nanopatterns and their relationships with DSA strategies, (iii) various potential applications of BCP nanopatterning, and (iv) mussel-inspired BCP nanopatterning for arbitrary substrate materials including low surface energy materials.
키워드
SOFT GRAPHOEPITAXY; SURFACE PATTERNS; LARGE-AREA; LITHOGRAPHY; TEMPLATES; GRAPHENE; POLYMER; ARRAYS; PHOTORESIST; FABRICATION
- 제목
- Directed self-assembly of block copolymers for universal nanopatterning
- 저자
- Kim, Bong Hoon; Kim, Ju Young; Kim, Sang Ouk
- 발행일
- 2013-03
- 유형
- Article
- 저널명
- Soft Matter
- 권
- 9
- 호
- 10
- 페이지
- 2780 ~ 2786