Micromachining of glass by electrochemical discharge machining and grinding

초록

This paper presents a hybrid method combining electrochemical discharge machining (ECDM) and micro grinding to machine micro structures on glass. First, micro structures are machined by ECDM and then ground by a polycrystalline diamond ( PCD) tool to improve surface roughness. The present work shows investigations of ECDM characteristics such as the effects of the electrolyte solution, voltage, and machining feedrate. The characteristics of PCD grinding are also investigated to improve surface quality of structures without cracks. By applying this hybrid method, 3D structures on glass with good surface roughness can be machined.