Eddy Current Damper Type Reaction Force Compensation Mechanism for Linear Motor Motion Stage

초록

The base vibration of a linear motor motion stage has been reduced with a passive reaction force compensation (RFC) mechanism based on a movable magnet track and springs. This paper presents the design procedure of an eddy-current damper (ECD) type RFC mechanism for a linear motor motion stage. The RFC mechanism with a movable magnet track and an ECD can overcome the disadvantages of the spring based RFC mechanism such as resonance and difficulty of assembly due to springs. A lumped parameter model for the ECD type RFC mechanism is derived considering sinusoidal magnetic flux density and the effective width of the ECD according to magnet track motion. Then, an iterative design procedure for ECD type RFC mechanisms is proposed to meet system requirements such as the transmission ratio of the reaction force and the maximum magnet track motion. Finally, a design example illustrates the effectiveness of the proposed design procedure for an ECD type RFC mechanism.

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